Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nano-materials and MEMS/ edited by Kiyotaka Wasa, Isaka Kanno and Hidetoshi Kotera

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TextPublication details: Oxford : Elsevier, 2012.Edition: 2nd editionDescription: xii, 644 p. : illISBN:

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Cover image	Item type	Current library	Home library	Collection	Shelving location	Call number	Materials specified	Vol info	URL	Copy number	Status	Notes	Date due	Barcode	Item holds	Item hold queue priority	Course reserves
	Books	Headquarters Lending Library General Collection		Non Fiction		671.738 HAN (Browse shelf(Opens below))					Available			0106271

Includes index

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