Handbook of sputter deposition technology : (Record no. 24543)

MARC details
000 -LEADER
fixed length control field 00789nam a22002297a 4500
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 170330b xxu||||| |||| 00| 0 eng d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9781437734836
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 671.738
245 00 - TITLE STATEMENT
Title Handbook of sputter deposition technology :
Remainder of title fundamentals and applications for functional thin films, nano-materials and MEMS/
Statement of responsibility, etc. edited by Kiyotaka Wasa, Isaka Kanno and Hidetoshi Kotera
250 ## - EDITION STATEMENT
Edition statement 2nd edition
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. Oxford :
Name of publisher, distributor, etc. Elsevier,
Date of publication, distribution, etc. 2012.
300 ## - PHYSICAL DESCRIPTION
Extent xii, 644 p. :
Other physical details ill.
500 ## - GENERAL NOTE
General note Includes index
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Cathode sputtering (Plating process)
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Thin films
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Microelectromechanical systems
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Nanostructured materials
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Wasa, Kiyotaka
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Kanno, Isaku
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Kotera, Hidetoshi
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Source of classification or shelving scheme Dewey Decimal Classification
Koha item type Books
Holdings
Withdrawn status Lost status Source of classification or shelving scheme Damaged status Not for loan Collection Home library Current library Shelving location Date acquired Source of acquisition Cost, normal purchase price Full call number Barcode Date last seen Cost, replacement price Price effective from Koha item type
    Dewey Decimal Classification     Non Fiction Headquarters Lending Library Headquarters Lending Library General Collection 09/02/2018 BAI 4000.00 671.738 HAN 0106271 14/09/2026 6000.00 09/02/2018 Books