| 000 | 00789nam a22002297a 4500 | ||
|---|---|---|---|
| 008 | 170330b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9781437734836 | ||
| 082 | _a671.738 | ||
| 245 | 0 | 0 |
_aHandbook of sputter deposition technology : _bfundamentals and applications for functional thin films, nano-materials and MEMS/ _cedited by Kiyotaka Wasa, Isaka Kanno and Hidetoshi Kotera |
| 250 | _a2nd edition | ||
| 260 |
_aOxford : _bElsevier, _c2012. |
||
| 300 |
_axii, 644 p. : _bill. |
||
| 500 | _aIncludes index | ||
| 650 | 0 | _aCathode sputtering (Plating process) | |
| 650 | 0 | _aThin films | |
| 650 | 0 | _aMicroelectromechanical systems | |
| 650 | 0 | _aNanostructured materials | |
| 700 | 1 | _aWasa, Kiyotaka | |
| 700 | 1 | _aKanno, Isaku | |
| 700 | 1 | _aKotera, Hidetoshi | |
| 942 |
_2ddc _cBK |
||
| 999 |
_c24543 _d24543 |
||