TY  - BOOK
AU  - Wasa,Kiyotaka
AU  - Kanno,Isaku
AU  - Kotera,Hidetoshi
TI  - Handbook of sputter deposition technology: fundamentals and applications for functional thin films, nano-materials and MEMS
SN  - 9781437734836
U1  - 671.738 
PY  - 2012///
CY  - Oxford
PB  - Elsevier, 
KW  - Cathode sputtering (Plating process)
KW  - Thin films
KW  - Microelectromechanical systems
KW  - Nanostructured materials
N1  - Includes index
ER  -