fundamentals and applications for functional thin films, nano-materials and MEMS Wasa, Kiyotaka Kanno, Isaku Kotera, Hidetoshi text xxu Oxford Elsevier 2012 2nd edition monographic eng

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xii, 644 p. : ill. edited by Kiyotaka Wasa, Isaka Kanno and Hidetoshi Kotera Includes index Cathode sputtering (Plating process) Thin films Microelectromechanical systems Nanostructured materials 671.738 9781437734836 170330