00789nam a22002297a 4500 170330b xxu||||| |||| 00| 0 eng d 9781437734836 671.738 Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nano-materials and MEMS/ edited by Kiyotaka Wasa, Isaka Kanno and Hidetoshi Kotera 2nd edition Oxford : Elsevier, 2012. xii, 644 p. : ill. Includes index Cathode sputtering (Plating process) Thin films Microelectromechanical systems Nanostructured materials Wasa, Kiyotaka Kanno, Isaku Kotera, Hidetoshi ddc BK 24543 24543 0 0 ddc 0 0 NFIC HQ HQ GEN 2018-02-09 BAI 4000.00 671.738 HAN 0106271 2026-09-14 06:37:40 6000.00 2018-02-09 BK