00736nam a22002057a 4500008004100000020001800041082001200059245019000071250001600261260003200277300002400309500001900333650004100352650001500393650003500408650002900443700001900472700001700491700002200508170330b        xxu||||| |||| 00| 0 eng d  a9781437734836  a671.73800aHandbook of sputter deposition technology :bfundamentals and applications for functional thin films, nano-materials and MEMS/cedited by Kiyotaka Wasa, Isaka Kanno and Hidetoshi Kotera  a2nd edition  aOxford :bElsevier, c2012.  axii, 644 p. :bill.  aIncludes index 0aCathode sputtering (Plating process) 0aThin films 0aMicroelectromechanical systems 0aNanostructured materials1 aWasa, Kiyotaka1 aKanno, Isaku1 aKotera, Hidetoshi