Handbook of sputter deposition technology :  fundamentals and applications for functional thin films, nano-materials and MEMS/ 
edited by Kiyotaka Wasa, Isaka Kanno and Hidetoshi Kotera 
 - 2nd edition 
 - Oxford :  Elsevier,   2012. 
 - xii, 644 p. :  ill. 
<br/><br/> Includes index 
<br/><br/><label>ISBN: </label>9781437734836 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Cathode sputtering (Plating process)<br/>Thin films<br/>Microelectromechanical systems<br/>Nanostructured materials
<br/><br/><label>Dewey Class. No.: </label>671.738